Influence of Czochralski silicon crystal growth on wafer...

Materials Science and Engineering: B 2000 Vol. 73; Iss. 1-3

Influence of Czochralski silicon crystal growth on wafer quality: an extensive investigation using traditional and new characterization techniques

M Porrini, P Collareta, G Borionetti, D Gambaro, I Fini
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Volume:
73
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0921-5107(99)00453-5
File:
PDF, 400 KB
english, 2000
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