Effect of ultraprecision grinding on the microstructural...

Effect of ultraprecision grinding on the microstructural change in silicon monocrystals

I. Zarudi, L.C. Zhang
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Volume:
84
Year:
1998
Language:
english
Pages:
10
DOI:
10.1016/s0924-0136(98)00090-9
File:
PDF, 963 KB
english, 1998
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