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Laser-induced changes of silicon carbon films studied by vibrational spectroscopy
H. Hobert, H.H. Dunken, S. Urban, F. Falk, H. StafastVolume:
29
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0924-2031(01)00200-4
File:
PDF, 120 KB
english, 2002