SPIE Proceedings [SPIE SPIE's 1992 Symposium on Process Control and Monitoring - Somerset, NJ (Sunday 22 March 1992)] Optically Based Methods for Process Analysis - Infrared phase-modulated ellipsometer for in-situ characterization of surfaces and thin films
Blayo, Nadine, Drevillon, Bernard, Ossikovski, Razvigor, Bomse, David S., Brittain, Harry, Farquharson, Stuart, Lerner, Jeremy M., Rein, Alan J., Sohl, Cary, Todd, Terry R., Weyer, LoisVolume:
1681
Year:
1992
Language:
english
DOI:
10.1117/12.137728
File:
PDF, 1.56 MB
english, 1992