SPIE Proceedings [SPIE Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV - Constanta, Romania (Thursday 28 August 2008)] Advanced Topics in Optoelectronics, Microelectronics, and Nanotechnologies IV - White light interferometry applications in nanometrology
Damian, V. S., Bojan, M., Schiopu, P., Iordache, I., Ionita, B., Apostol, D., Schiopu, Paul, Panait, Cornel, Caruntu, George, Manea, AdrianVolume:
7297
Year:
2009
Language:
english
DOI:
10.1117/12.823664
File:
PDF, 327 KB
english, 2009