![](/img/cover-not-exists.png)
A differential capacitive low-g microaccelerometer with mg resolution
Francis E.H Tay, J Xu, V.J LogeeswaranVolume:
86
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(00)00424-6
File:
PDF, 644 KB
english, 2000