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Shape deterioration of mesa structures in post-CMOS anisotropic etching of silicon microsensors: an experimental study
Hidekuni Takao, Chuck-Chen Yong, K. Rajanna, Makoto IshidaVolume:
86
Year:
2000
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(00)00437-4
File:
PDF, 502 KB
english, 2000