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Silicon anisotropic etching in alkaline solutions IV: The effect of organic and inorganic agents on silicon anisotropic etching process
Irena Zubel, Irena Barycka, Kamilla Kotowska, Małgorzata KramkowskaVolume:
87
Year:
2001
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(00)00481-7
File:
PDF, 313 KB
english, 2001