Direct writing for three-dimensional microfabrication using...

Sensors and Actuators A: Physical 2001 Vol. 89; Iss. 1-2

Direct writing for three-dimensional microfabrication using synchrotron radiation etching

Takanori Katoh, Nobuyoshi Nishi, Masafumi Fukagawa, Hiroshi Ueno, Susumu Sugiyama
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Volume:
89
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(00)00528-8
File:
PDF, 439 KB
english, 2001
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