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MEMS flow sensors for nano-fluidic applications
Shuyun Wu, Qiao Lin, Yin Yuen, Yu-Chong TaiVolume:
89
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(00)00541-0
File:
PDF, 531 KB
english, 2001