Phase-only micromirror array fabricated by standard CMOS...

Sensors and Actuators A: Physical 2001 Vol. 89; Iss. 1-2

Phase-only micromirror array fabricated by standard CMOS process

Adisorn Tuantranont, Li-Anne Liew, Victor M. Bright, Wenge Zhang, Y.C. Lee
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Volume:
89
Year:
2001
Language:
english
Pages:
11
DOI:
10.1016/s0924-4247(00)00544-6
File:
PDF, 963 KB
english, 2001
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