A noble suspended type thin film resonator (STFR) using the...

Sensors and Actuators A: Physical 2001 Vol. 89; Iss. 3

A noble suspended type thin film resonator (STFR) using the SOI technology

Hyun Ho Kim, Byeong Kwon Ju, Yun Hi Lee, Si Hyung Lee, Jeon Kook Lee, Soo Won Kim
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Volume:
89
Year:
2001
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(00)00551-3
File:
PDF, 457 KB
english, 2001
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