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A study of the static characteristics of a torsional micromirror
X.M. Zhang, F.S. Chau, C. Quan, Y.L. Lam, A.Q. LiuVolume:
90
Year:
2001
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(01)00453-8
File:
PDF, 743 KB
english, 2001