Magneto-surface-acoustic-waves microdevice using thin film...

Sensors and Actuators A: Physical 2001 Vol. 91; Iss. 1-2

Magneto-surface-acoustic-waves microdevice using thin film technology: design and fabrication process

H Chiriac, M Pletea, E Hristoforou
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Volume:
91
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(01)00500-3
File:
PDF, 361 KB
english, 2001
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