Analysis of the extended operation range of electrostatic...

Sensors and Actuators A: Physical 2001 Vol. 90; Iss. 3

Analysis of the extended operation range of electrostatic actuators by current-pulse drive

L Castañer, J Pons, R Nadal-Guardia, A Rodrı́guez
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Volume:
90
Year:
2001
Language:
english
Pages:
10
DOI:
10.1016/s0924-4247(01)00525-8
File:
PDF, 271 KB
english, 2001
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