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The diagnostic micromachined beams on (1 1 1) substrate
Hsin-Hwa Hu, Hung-Yi Lin, Weileun Fang, Bruce C.S. ChouVolume:
93
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(01)00652-5
File:
PDF, 374 KB
english, 2001