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A novel bulk micromachined gyroscope based on a rectangular beam-mass structure
Heng Yang, Minhang Bao, Hao Yin, Shaoqun ShenVolume:
96
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(01)00784-1
File:
PDF, 170 KB
english, 2002