Micromachined inclinometer with high sensitivity and very...

Sensors and Actuators A: Physical 2002 Vol. 97-98; Iss. none

Micromachined inclinometer with high sensitivity and very good stability

S. Billat, H. Glosch, M Kunze, F. Hedrich, J. Frech, J. Auber, H. Sandmaier, W Wimmer, W. Lang
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Volume:
97-98
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(01)00824-x
File:
PDF, 158 KB
english, 2002
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