Characteristics of plasma generated by polysilicon...

Sensors and Actuators A: Physical 2002 Vol. 96; Iss. 2-3

Characteristics of plasma generated by polysilicon semiconductor bridge (SCB)

Kye-Nam Lee, Myung-Il Park, Sung-Ho Choi, Chong-Ook Park, Han S. Uhm
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
96
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(01)00836-6
File:
PDF, 171 KB
english, 2002
Conversion to is in progress
Conversion to is failed