A symmetric surface micromachined gyroscope with decoupled...

A symmetric surface micromachined gyroscope with decoupled oscillation modes

Said Emre Alper, Tayfun Akin
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Volume:
97-98
Year:
2002
Language:
english
Pages:
12
DOI:
10.1016/s0924-4247(01)00860-3
File:
PDF, 683 KB
english, 2002
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