The NanoPirani—an extremely miniaturized pressure sensor...

The NanoPirani—an extremely miniaturized pressure sensor fabricated by focused ion beam rapid prototyping

R. Puers, S. Reyntjens, D. De Bruyker
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Volume:
97-98
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(01)00863-9
File:
PDF, 540 KB
english, 2002
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