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On the effect of residual charges on the pull-in parameters of electrostatic actuators
Ofir Bochobza-Degani, Eran Socher, Yael NemirovskyVolume:
97-98
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(01)00870-6
File:
PDF, 165 KB
english, 2002