Fabrication method for out-of-plane, micro-coil by surface...

Sensors and Actuators A: Physical 2002 Vol. 97-98; Iss. none

Fabrication method for out-of-plane, micro-coil by surface micromachining

Murat Gel, Shoji Takeuchi, Isao Shimoyama
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Volume:
97-98
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(02)00007-9
File:
PDF, 497 KB
english, 2002
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