Fabrication and properties of ultrasmall Si wire arrays...

Sensors and Actuators A: Physical 2002 Vol. 97-98; Iss. none

Fabrication and properties of ultrasmall Si wire arrays with circuits by vapor–liquid–solid growth

Takeshi Kawano, Yoshiko Kato, Masato Futagawa, Hidekuni Takao, Kazuaki Sawada, Makoto Ishida
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Volume:
97-98
Year:
2002
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(02)00008-0
File:
PDF, 583 KB
english, 2002
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