A high-stroke, high-pressure electrostatic actuator for...

Sensors and Actuators A: Physical 2002 Vol. 100; Iss. 2-3

A high-stroke, high-pressure electrostatic actuator for valve applications

Wouter van der Wijngaart, Håkan Ask, Peter Enoksson, Göran Stemme
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Volume:
100
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(02)00070-5
File:
PDF, 556 KB
english, 2002
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