Fabrication of thermal-isolation structure for microheater...

Sensors and Actuators A: Physical 2002 Vol. 100; Iss. 1

Fabrication of thermal-isolation structure for microheater elements applicable to fingerprint sensors

Han Ji-song, T. Kadowaki, K. Sato, M. Shikida
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Volume:
100
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(02)00136-x
File:
PDF, 809 KB
english, 2002
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