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The influence of residual stress and membrane thickness on the performance of Fe–Ni–Cr/Invar bimetal freestanding membrane for microdevices
Yu-Jung Hsu, Yen-Hwei Chang, Yin-Lai Chai, Guo-Ju ChenVolume:
101
Year:
2002
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(02)00213-3
File:
PDF, 288 KB
english, 2002