Ultrathick SU-8 mold formation and removal, and its...

Ultrathick SU-8 mold formation and removal, and its application to the fabrication of LIGA-like micromotors with embedded roots

Chien-Hung Ho, Kan-Ping Chin, Chii-Rong Yang, Hsien-Ming Wu, Soon-Lin Chen
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Volume:
102
Year:
2002
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(02)00297-2
File:
PDF, 897 KB
english, 2002
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