A high Q, large tuning range MEMS capacitor for RF filter...

Sensors and Actuators A: Physical 2003 Vol. 103; Iss. 1-2

A high Q, large tuning range MEMS capacitor for RF filter systems

Robert L. Borwick III, Philip A. Stupar, Jeffrey DeNatale, Robert Anderson, Chialun Tsai, Kathleen Garrett, Robert Erlandson
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Volume:
103
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0924-4247(02)00316-3
File:
PDF, 451 KB
english, 2003
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