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Experimental study of thermoelastic damping in MEMS gyros
Amy Duwel, John Gorman, Marcie Weinstein, Jeff Borenstein, Paul WardVolume:
103
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(02)00318-7
File:
PDF, 206 KB
english, 2003