Characterization of silicon wafer bonding for Power MEMS applications
Arturo A. Ayón, Xin Zhang, Kevin T. Turner, Dongwon Choi, Bruno Miller, Steven F. Nagle, S.Mark SpearingVolume:
103
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(02)00329-1
File:
PDF, 621 KB
english, 2003