Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators
Li-Anne Liew, R.A. Saravanan, Victor M. Bright, Martin L. Dunn, John W. Daily, Rishi RajVolume:
103
Year:
2003
Language:
english
Pages:
11
DOI:
10.1016/s0924-4247(02)00330-8
File:
PDF, 532 KB
english, 2003