A micromachined RF microrelay with electrothermal actuation

Sensors and Actuators A: Physical 2003 Vol. 103; Iss. 1-2

A micromachined RF microrelay with electrothermal actuation

Ye Wang, Zhihong Li, Daniel T. McCormick, Norman C. Tien
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Volume:
103
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(02)00337-0
File:
PDF, 280 KB
english, 2003
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