Design and investigation of multi-level digitally positioned micromirror for open-loop controlled applications
Jianglong Zhang, Zhongxia Zhang, Y.C. Lee, Victor M. Bright, John NeffVolume:
103
Year:
2003
Language:
english
Pages:
13
DOI:
10.1016/s0924-4247(02)00340-0
File:
PDF, 806 KB
english, 2003