Microfabricated silicon coaxial field sensors for...

Sensors and Actuators A: Physical 2002 Vol. 102; Iss. 1-2

Microfabricated silicon coaxial field sensors for near-field scanning optical and microwave microscopy

Björn T. Rosner, Toralf Bork, Vivek Agrawal, Daniel W. van der Weide
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Volume:
102
Year:
2002
Language:
english
Pages:
10
DOI:
10.1016/s0924-4247(02)00341-2
File:
PDF, 595 KB
english, 2002
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