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Thermo-mechanical behavior of thick PECVD oxide films for power MEMS applications
Xin Zhang, Kuo-Shen Chen, S. Mark SpearingVolume:
103
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(02)00343-6
File:
PDF, 386 KB
english, 2003