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An integrated piezo-acoustic shear-force distance sensor with nanometer resolution for a micropipette tool
Daniel Haefliger, Marc Muenchinger, Georg Schitter, Andreas StemmerVolume:
103
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(02)00406-5
File:
PDF, 190 KB
english, 2003