Selective wafer-level adhesive bonding with benzocyclobutene for fabrication of cavities
J. Oberhammer, F. Niklaus, G. StemmeVolume:
105
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(03)00202-4
File:
PDF, 278 KB
english, 2003