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Simulation of a membrane-based gas flow sensor
Bespalov, V. A., Vasil’ev, I. A., Dyuzhev, N. A., Mazurkin, N. S., Novikov, D. V., Popkov, A. F.Volume:
44
Language:
english
Journal:
Russian Microelectronics
DOI:
10.1134/s1063739715070033
Date:
December, 2015
File:
PDF, 322 KB
english, 2015