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Mechanical behavior of microfabricated Si/SiO2 mushroom structures
Cyro K. Saul, Carlos M. Lepienski, Maurı́cio P. Cantão, Wido H. SchreinerVolume:
107
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(03)00300-5
File:
PDF, 155 KB
english, 2003