High-resolution MOS magnetic sensor with thin oxide in...

Sensors and Actuators A: Physical 1996 Vol. 57; Iss. 1

High-resolution MOS magnetic sensor with thin oxide in standard submicron CMOS process

Hong-Ming Yang, Yu-Chung Huang, Lei Tan-Fu, Chung-Len Lee, Shu-Chi Chao
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Volume:
57
Year:
1996
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(96)01327-1
File:
PDF, 408 KB
english, 1996
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