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Optimization and performance of high-resolution micro-optomechanical thermal sensors
J. Lai, T. Perazzo, Z. Shi, A. MajumdarVolume:
58
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0924-4247(96)01401-x
File:
PDF, 352 KB
english, 1997