Electrically removable, micromachined encapsulation for sensitive materials
M. Roth, S. Vogel, U. Schaber, H.-E. EndresVolume:
62
Year:
1997
Language:
english
Pages:
3
DOI:
10.1016/s0924-4247(97)01482-9
File:
PDF, 810 KB
english, 1997