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A study of two-step silicon anisotropic etching for a polygon-shaped microstructure using KOH solution
In-Byeong Kang, Malcolm R. Haskard, Noel D. SamaanVolume:
62
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)01500-8
File:
PDF, 3.85 MB
english, 1997