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Optimization of a three-electrode electrochemical etch-stop process
J.G. Elizalde, S. Olaizola, G. Bistué, E. Castaño, A. García-Alonso, F.J. GraciaVolume:
62
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0924-4247(97)01540-9
File:
PDF, 368 KB
english, 1997