Problems of sacrificial etching in the presence of aluminium interconnect
J.F.L. Goosen, B.P. van DrieEnhuizen, P.J. French, R.F. WolffenbuttelVolume:
62
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0924-4247(97)01562-8
File:
PDF, 2.82 MB
english, 1997