Improvement of the linearity of a capacitive pressure sensor using an interdigitated electrode structure
Hyeoncheol Kim, Yong-Gwon Jeong, Kukjin ChunVolume:
62
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(97)01591-4
File:
PDF, 443 KB
english, 1997