Sensors on low-dimensional silicon structures

Sensors and Actuators A: Physical 1997 Vol. 62; Iss. 1-3

Sensors on low-dimensional silicon structures

D. Bilenko, O. Belobrovaya, E. Jarkova, O. Coldobanova, I. Mysenko, E. Khasina
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Volume:
62
Year:
1997
Language:
english
Pages:
3
DOI:
10.1016/s0924-4247(97)01621-x
File:
PDF, 279 KB
english, 1997
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