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Mirage-effect-based depth profiling of micromachined silicon structures
Suneet Tuli, Amalendu B. Bhattacharyya, Benoit C. Forget, Daniele FournierVolume:
64
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0924-4247(97)01623-3
File:
PDF, 391 KB
english, 1998