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A MEMS thermopneumatic silicone rubber membrane valve
Xing Yang, Charles Grosjean, Yu-Chong Tai, Chih-Ming HoVolume:
64
Year:
1998
Language:
english
Pages:
8
DOI:
10.1016/s0924-4247(97)01660-9
File:
PDF, 868 KB
english, 1998